The technology of the low-temperature sterilization has been researched by all over the world because of its many advantages such as fast, safe and high efficiency. Based on the theory of dielectric barrier discharge (DBD) and plasma sterilization, and adapts the DSP with its ability of high speed processing data, has made a new low-temperature plasma power supply. According to the application of Fuzzy-DPLL based on DSP, the power supply can track the load resonant frequency rapidly and accurately.